1.

Conference Proceedings
Conference Proceedings
1. Monte Carlo modeling of secondary electron imaging in three dimensions
J. S. Villarrubia ; N. W. M. Ritchie ; J. R. Lowney
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. Line edge roughness characterization of sub-50nm structures using CD-SAXS: round-robin benchmark results
C. Wang ; R. L. Jones ; E. K. Lin ; W. Wu ; J. S. Villarrubia ; K. Choi ; J. S. Clarke ; B. J. Rice ; M. Leeson ; J. Roberts ; R. Bristol ; B. Bunday
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. Accurate and traceable dimensional metrology with a reference CD-SEM
A. E. Vladár ; J. S. Villarrubia ; P. Cizmar ; M. Oral ; M. T. Postek
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220H-1-69220H-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922