1.

Conference Proceedings
Conference Proceedings
1. Mist Deposition for TFT Technology
K. Shanmugasundaram ; S. Price ; K. Chang ; D. Lee ; J. Ruzyllo
Pub. info.: Thin Film Transistor Technology 8.  pp.255-259,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(8)
2.

Conference Proceedings
Conference Proceedings
2. Interactions of Sapphire Surfaces with Standard Cleaning Solutions
K.W. Kirby ; K. Shanmugasundaram ; V. Bojan ; J. Ruzyllo
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.343-349,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
3.

Conference Proceedings
Conference Proceedings
3. Evolution of Silicon Cleaning Technology Over the Last Twenty Years
J. Ruzyllo ; T. Hattori ; R.E. Novak ; P. Mertens ; P. Besson
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.3-7,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)
4.

Conference Proceedings
Conference Proceedings
4. EFFECT OF SILICON SURFACE CONDITION ON FILM FORMATION USING MIST DEPOSITION
K. Shanmugasundaram ; K. Chang ; J. Ruzyllo
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.105-110,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
5.

Conference Proceedings
Conference Proceedings
5. SURFACE ROUGHNESS IN SILICON CARBIDE TECHNOLOGY
K. Chang ; T. Witt ; A. Hoff ; R. Woodin ; R. Ridley ; G. Dolny ; K. Shanmugasundaram ; E. Oborina ; J. Ruzyllo
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.228-233,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
6.

Conference Proceedings
Conference Proceedings
6. Semiconductor Surface Cleaning and Conditioning Challenges Beyond Planar Silicon Technology
J. Ruzyllo
Pub. info.: Microelectronics Technology and Devices : SBMICRO 2007.  pp.87-96,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 9(1)
7.

Conference Proceedings
Conference Proceedings
7. Electrical Studies on Metal/SrTa2O6 or TiO2/ Si Substrate Stack Systems
O. O. Awadelkarim ; J. Jiang ; S. A. Suliman ; K. Saipatwari ; L. J. Passmore ; D. Lee ; P. Roman ; J. Ruzyllo
Pub. info.: Microelectronics Technology and Devices : SBMICRO 2007.  pp.353-362,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 9(1)