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105 results

Conference Proceedings

1. Chemical Mechanical Polishing of Epitaxial Germanium on SiO₂-patterned Si(001) Substrates

J.M. Hydrick ; J. Park ; J. Bai ; C. Major ; M. Curtin

Pub. info.:	SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices. pp.237-248, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	16(10)

Conference Proceedings

2. The Geometry Effect of A Counter-Doped Lateral Body Terminal on Poly-Si TFTs

S. Han ; I. Ji ; J. Park ; S. Choi ; J. Yoo

Pub. info.:	Thin Film Transistor Technology 8. pp.137-142, 2006. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	3(8)

Conference Proceedings

3. Fabrication and Characterization of Organic Light-Emitting Diodes using Transparent Single-Crystal-Silicon Membrane

S. Lee ; D. Kim ; H. Yang ; G. Lee ; J. Park

Pub. info.:	Nanotechnology (General) - 213th ECS Meeting. pp.13-17, 2008. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	13(18)

Conference Proceedings

4. Effect of Particle Deposition and Wet/Dry Cleaning Methods on Particle Removal Efficiency

T. Kim ; S. Hu ; A.A. Busnaina ; J. Park

Pub. info.:	Cleaning and surface conditioning technology in semiconductor device manufacturing 10. pp.361-367, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	11(2)

Conference Proceedings

5. Removal of Organic Wax and Particles on Silicon after Batch type Polishing by Ozonated DI Water

J. Yi ; S. Lee ; T. Kim ; J. Park ; G. Lee

Pub. info.:	Cleaning and surface conditioning technology in semiconductor device manufacturing 10. pp.79-84, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	11(2)

Conference Proceedings

6. Surface Preparation in CMP Process; Post CMP Cleaning and Defects

J. Park ; T. Kim

Pub. info.:	Cleaning and surface conditioning technology in semiconductor device manufacturing 10. pp.419-430, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	11(2)

Conference Proceedings

7. Quantitative Measurement of Pattern Collapse and Particle Removal Force

T. Kim ; K.L. Wostyn ; P. Mertens ; A.A. Busnaina ; J. Park

Pub. info.:	Cleaning and surface conditioning technology in semiconductor device manufacturing 10. pp.123-129, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	11(2)

Conference Proceedings

8. Post W CMP Cleaning Without HF Cleans

Y. Kang ; C. Yang ; T. Kwon ; J. Park ; J. Jo

Pub. info.:	Cleaning and surface conditioning technology in semiconductor device manufacturing 10. pp.441-445, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	11(2)

Conference Proceedings

9. Effect of Poly Silicon Wettability on Polymeric Residue Contamination

Y. Kang ; J. Park ; Y. Hong ; S. Han ; S. Yun

Pub. info.:	Cleaning and surface conditioning technology in semiconductor device manufacturing 10. pp.455-461, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	11(2)

10.

Conference Proceedings

10. Application of Lattice Boltzmann Method to the Simulation of Multiphase Flow in the Inhomogeneous Porous Electrode of a PEM Fuel Cell

J. Park ; X. Li

Pub. info.:	Fuel Cell Seminar 2007. pp.81-92, 2008. Pennington, N.J.. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	12(1)

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Author: J. Park