1.

Conference Proceedings
Conference Proceedings
1. Metrology challenges for advanced lithography techniques
I. Englard ; P. Vanoppen ; J. Finders ; I. Minnaert-Janssen ; F. Duray ; J. Meessen ; G. Janssen ; O. Adan ; L. Gershtein ; R. Peltinov ; C. Masia ; R. Piech
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. Pitch doubling through dual-patterning lithography challenges in integration and litho budgets
M. Dusa ; J. Quaedackers ; O. F. A. Larsen ; J. Meessen ; E. van der Heijden ; G. Dicker ; O. Wismans ; P. de Haas ; K. van I. Schenau ; J. Finders ; B. Vleeming ; G. Storms ; P. Jaenen ; S. Cheng ; M. Maenhoudt
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings
Conference Proceedings
3. OPC cycle time reduction and accuracy improvement by early access to advanced Tachyon modeling of TWINSCAN XT:1900i scanner
P. Nikolsky ; T. Nooitgedagt ; P. van Adrichem ; J. Meessen ; C. Kohler
Pub. info.: Photomask technology 2008.  2  pp.712249-1-712249-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
4.

Conference Proceedings
Conference Proceedings
4. CD bias reduction in CD-SEM linewidth measurements for advanced lithography
M. Tanaka ; J. Meessen ; C. Shishido ; K. Watanabe ; I. Minnaert-Janssen
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69221T-1-69221T-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
5.

Conference Proceedings
Conference Proceedings
5. Real-time 3D video conference on generic hardware
X. Desurmont ; J. L. Bruyelle ; D. Ruiz ; J. Meessen ; B. Macq
Pub. info.: Real-time image processing 2007 : 29-30 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6496
6.

Conference Proceedings
Conference Proceedings
6. Real-time road traffic classification using mobile video cameras
A. Lapeyronnie ; C. Parisot ; J. Meessen ; X. Desurmont ; J.-F. Delaigle
Pub. info.: Real-time image processing 2008 : 28-29 January 2008, San Jose, California, USA.  pp.681108-1-681108-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6811