1.

Conference Proceedings
Conference Proceedings
1. Impact of Hf-Precursor Choice on Scaling and Performance of High-κ Gate Dielectrics
J. Maes ; Y. Fedorenko ; A. Delabie ; L. Ragnarsson ; J. Swerts
Pub. info.: Physics and technology of high-k gate dielectrics 5.  pp.59-72,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(4)
2.

Conference Proceedings
Conference Proceedings
2. ALD La-Based Oxides for Vt-Tuning in High-Κ/Metal Gate Stacks
J. Swerts ; Y. Fedorenko ; J. Maes ; E. Tois ; A. Delabie
Pub. info.: Atomic layer deposition applications 3.  pp.201-211,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(7)
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of Nb(Si)N as Metal Gate Material
N. Van Hoornick ; H. De Witte ; T. Hitters ; C. Zhao ; T. Canard ; H. Huatori ; J. Swerts ; T. Schram ; J. Maes ; S. De Gendt ; M. Heyns
Pub. info.: Physics and technology of high-k gate dielectrics III.  pp.495-506,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(5)