1.

Conference Proceedings

Conference Proceedings
S. Lee ; C. Song ; J. Rhim ; H. Lee ; J. Kyoung
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  2  pp.692227-1-692227-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922
2.

Conference Proceedings

Conference Proceedings
S. Yun ; J. Song ; I. Yeo ; Y. Choi ; V. Yurlov ; S. An ; H. Park ; H. Yang ; Y. Lee ; K. Han ; I. Shyshkin ; A. Lapchuk ; K. Oh ; S. Ryu ; J. Jang ; C. Park ; C. Kim ; S. Kim ; E. Kim ; K. Woo ; J. Yang ; J. Kim ; S. Byun ; S. Lee ; O. Lim ; J. Cheong ; Y. Hwang ; G. Byun ; J. Kyoung ; S. Yoon ; J. Lee ; T. Lee ; S. Hong ; Y. Hong ; D. Park ; J. Kang ; W. Shin ; S. Oh ; B. Song ; H. Kim ; C. Koh ; Y. Ryu ; H. Lee ; Y. Baek
Pub. info.: Emerging liquid crystal technologies II : 21-22 and 24 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6487