1.

Conference Proceedings

Conference Proceedings
M. O. de Beeck ; J. Versluijs ; Z. Tokei ; S. Demuynck ; J. D. Marneffe ; W. Boullart ; S. Vanhaelemeersch ; H. Zhu ; P. Cirigliano ; E. Pavel ; R. Sadjadi ; J. Kim
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
2.

Conference Proceedings

Conference Proceedings
H. G. Lim ; J. Kim ; K. S. Kang
Pub. info.: Smart Structures, Devices, and Systems III.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6414
3.

Conference Proceedings

Conference Proceedings
Y. Jeon ; S. Jun ; J. Kang ; S. Lee ; J. Kim ; K. Kim
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
4.

Conference Proceedings

Conference Proceedings
S. Jun ; J. Kim ; E. Jeong ; Y. Yun ; K. Kim
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
5.

Conference Proceedings

Conference Proceedings
E. Jeong ; J. Kim ; K. Kim ; D. Kim ; H. Lim
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
6.

Conference Proceedings

Conference Proceedings
J. Park ; J. Kim ; Y. Ryu ; J. Lee
Pub. info.: Health Monitoring of Structural and Biological Systems 2007.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6532
7.

Conference Proceedings

Conference Proceedings
S. Choi ; J. Jang ; S. Yi ; J. Kim ; W. Jung
Pub. info.: Quantum Sensing and Nanophotonic Devices IV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6479
8.

Conference Proceedings

Conference Proceedings
H. K. Lim ; K. Y. Cho ; J. Kim ; K. S. Kang
Pub. info.: Nanosensors, Microsensors, and Biosensors and Systems 2007.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6528
9.

Conference Proceedings

Conference Proceedings
K. Y. Cho ; H. K. Lim ; Y. Chen ; J. Kim ; K. S. Kang
Pub. info.: Nanosensors, Microsensors, and Biosensors and Systems 2007.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6528
10.

Conference Proceedings

Conference Proceedings
K. D. Song ; T. B. Stout ; S. Yang ; J. Kim ; S. H. Choi
Pub. info.: Nanosensors, Microsensors, and Biosensors and Systems 2007.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6528