1.

Conference Proceedings

Conference Proceedings
U. Hofmann ; M. Oldsen ; H.-J. Quenzer ; J. Janes ; M. Heller
Pub. info.: MOEMS and miniaturized systems VII.  pp.688706-1-688706-15,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6887
2.

Conference Proceedings

Conference Proceedings
M. Oldsen ; U. Hofmann ; H. J. Quenzer ; J. Janes ; C. Stolte
Pub. info.: Micromachining and microfabrication process technology XIII.  pp.688208-1-688208-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6882