1.

Technical Paper

Technical Paper
B. Monzyk ; D. Clark ; R. Gilbert ; J. Busch ; D. Heiss ; P. Martin ; C. Pestak
Pub. info.: AIAA meeting papers on disc.  2008.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : International Energy Conversion Engineering Conference and Exhibit (IECEC)
Ser. no.: 2008
2.

Conference Proceedings

Conference Proceedings
B. Schulz ; R. Seltmann ; J. Busch ; F. Hempel ; E. Cotte ; B. Alles
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518