Applications of X rays generated from lasers and other bright sources II : 30-31 July 2001, San Diego, USA. pp.205-214, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Design, manufacturing, and testing of planar optical waveguide devices : 1 August 2001 San Diego, USA. pp.80-87, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part1 pp.204-213, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Microelectronic Device and Multilevel Interconnection Technology II. pp.207-215, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Photomask and Next-Generation Lithography Mask Technology VIII. pp.660-668, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering