1.

Conference Proceedings
Conference Proceedings
1. SEM review and discrete inspection of optically invisible defects in a production environment
Hinschberger, B. ; Gomber, C. ; Ithier, L. ; Couturier, L. ; Sherman, B. ; Rothlevi, O. ; Ben-Porath, A.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.162-167,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. In-line TEM sample preparation and wafer return strategy for rapid yield learning [6152-81]
Bicais-Lepinay, N. ; Andre, F. ; Brevers, S. ; Guyader, P. ; Trouiller, C. ; Kwakman, L. F. Tz. ; Pokrant, S. ; Verkleij, D. ; Schampers, R. ; Ithier, L. ; Sicurani, E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615217-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings
Conference Proceedings
3. Amplitude and spatial frequency characterization of line-edge roughness using CD-SEM
Eytan, G. ; Dror, O. ; Ithier, L. ; Florin, B. ; Lamouchi, Z. ; Martin, N.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.347-355,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689