1.
|
Conference Proceedings
|
Miura, H. ; Ishitsuka, N. ; Suzuki, N. ; Ohyu, K. ; Ikeda, S.
Pub. info.: |
ULSI Process Integration : proceedings of the International Symposium. pp.373-379, 2001. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
2001-2 |
|
2.
|
Conference Proceedings
|
Miura, H. ; Ishitsuka, N. ; Suzuki, N. ; Ikeda, S.
Pub. info.: |
ULSI process integration : proceedings of the first international symposium. pp.223-230, 1999. Pennington, NJ. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
99-18 |
|