1.

Conference Proceedings
Conference Proceedings
1. Reproducibility data on SUMMiT
Limary,S. ; Stewart,H. ; Irwin,L.W. ; McBrayer,J. ; Sniegowski,J.J. ; Montague,S. ; Smith,J.H. ; Boer,M.P.de ; Jakubczak,J.F.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.102-112,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings
Conference Proceedings
2. Electrostatic discharge/electrical overstress susceptibility in MEMS: a new failure mode
Walraven,J.A. ; Soden,J.M. ; Tanner,D.M. ; Tangyunyong,P. ; Cole Jr.,E.I. ; Anderson,R.E. ; Irwin,L.W.
Pub. info.: MEMS Reliability for Critical Applications.  pp.30-39,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180
3.

Conference Proceedings
Conference Proceedings
3. Characterization techniques for surface-micromachined devices
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.171-178,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
4.

Conference Proceedings
Conference Proceedings
4. Characterization techniques for surface-micromachined devices
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.431-438,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514