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13 results

Conference Proceedings

1. GAS PHASE DECOMPOSITION OF AN ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION PRECURSOR TO AlN: [Al(CH3)2NH2]3

Amato, Carmela C. ; Hudson, John B. ; Interrante, Leonard V.

Pub. info.:	Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.135-140, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	204

Conference Proceedings

2. INVESTIGATIONS OF (1, 3-DIMETHYL-3-METHYLSILAMETHYLENE-DISILACYCLOBUTANE) AS A SINGLE SOURCE CVD PRECURSOR TO SILICON CARBIDE

Larkin, David J. ; Interrante, Leonard V. ; Hudson, John B. ; Han, Bin

Pub. info.:	Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.141-148, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	204

Conference Proceedings

3. *PREPARATION OF NON-OXIDE CERAMICS BY PYROLYSIS OF ORGANOMETALLIC PRECURSORS

Interrante, Leonard V. ; Schmidt, Wayde R. ; Marchetti, Paul S. ; Maciel, Gary E.

Pub. info.:	Better ceramics through chemistry V : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.739-748, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	271

Conference Proceedings

4. THE DECOMPOSITION CHEMISTRY OF AN AlN PRECURSOR BIS-DIMETHYLALUMINUM DEUTERO-AMIDE, [(CH3)2AlND2]3, AS REVEALED BY TIME-OF-FLIGHT MOLECULAR BEAM MASS SPECTROMETRY

Amato, Carmela C. ; Hudson, John B. ; Interrante, Leonard V.

Pub. info.:	Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.611-616, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	282

Conference Proceedings

5. POLYMER-DERIVED Si3N4/BN COMPOSITES

Schmidt, Wayde R. ; Hurley Jr., William J. ; Sukumar, Vijay ; Doremus, Robert H. ; Interrante, Leonard V.

Pub. info.:	Polymer based molecular composites : symposium held November 27-30, 1989, Boston, Massachusetts, U.S.A.. pp.79-86, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	171

Conference Proceedings

6. GAS PHASE DECOMPOSITION OF AN ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION PRECURSOR TO A1N: [A1(CH3)2NH2]3

Amato, Carmela C. ; Hudson, John B. ; Interrante, Leonard V.

Pub. info.:	Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.119-124, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	168

Conference Proceedings

7. SURFACE DECOMPOSITION KINETICS OF ORGANOSILANE PRECURSORS TO SILICON CARBIDE

Han, Bin ; Hudson, John B. ; Interrante, Leonard V.

Pub. info.:	Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.457-462, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	282

Conference Proceedings

8. STUDIES OF ORGANOMETTALIC PRECURSORS TO ALUMINUM NITRIDE

Interrante, Leonard V. ; Carpenter, II Leslie E. ; Whitmarsh, Christopher ; Lee, Wei ; Garbauskas, Mary ; Slack, Glen A.

Pub. info.:	Better ceramics through chemistry II : symposium held April 15-19, 1986, Palo Alto, California, U.S.A.. pp.359-366, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	73

Conference Proceedings

9. CHEMICAL VAPOR DEPOSITION OF SILICON CARBIDE USING A NOVEL ORGAMOMETALLIC PRECURSOR

Lee, Wie ; Interrante, Leonard V. ; Czekaj, Corrina ; Hudson, John ; Lenz, Klaus ; Sun, Bing-Xi

Pub. info.:	Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.431-438, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	131

10.

Conference Proceedings

10. Preparation of the High-Temperature Superconductor YBa2Cu3O7-x

Interrante, Leonard V. ; Jiang, Zhiping ; Larkin, David J.

Pub. info.:	Chemistry of high-temperature superconductors. pp.168-, 1988. Washington, DC. American Chemical Society
Title of ser.:	ACS symposium series
Ser. no.:	377

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