1.

Conference Proceedings
Conference Proceedings
1. Development of hot spot fixer (HSF) [6156-51]
Kotani, T. ; Kyoh, S. ; Kobayashi, S. ; Inazu, T. ; Ikeuchi, A. ; Urakawa, Y. ; Inoue, S. ; Morita, E. ; Klaver, S. ; Horiuchi, T. ; Peeters, J. ; Kuramoto, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. Hot spot management in ultra-low kl lithography [6156-24]
Hashimoto, K. ; Usui, S. ; Nojima, S. ; Tanaka, S. ; Yamanaka, E. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
3.

Conference Proceedings
Conference Proceedings
3. Lithography oriented DfM for 65 nm and beyond [6156-14]
Kyoh, S. ; Kotani, T. ; Kobayashi, S. ; Ikeuchi, A. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
4.

Conference Proceedings
Conference Proceedings
4. Image stabilization system on SOLAR-B Solar Optical Telescope
Shimizu, T. ; Nagata, S. ; Edwards, C. ; Tarbell, T. ; Kashiwagi, Y. ; Kodeki, K. ; Ito, O. ; Miyagawa, H. ; Nagase, M. ; Inoue, S. ; Kaneko, K. ; Sakamoto, Y. ; Ichimoto, K. ; Tsuneta, S. ; Miki, S. ; Endo, M. ; Tabata, M. ; Nakaoji, T. ; Matsuzaki, K. ; Kobayashi, K. ; Otsubo, M. ; Suematsu, Y. ; Kumagai, K. ; Noguchi, M. ; Tamura, T. ; Nakagiri, M.
Pub. info.: Optical, infrared, and millimeter space telescopes : 21-25 June 2004, Glasgow, Scotland, United Kingdom.  pp.1199-1206,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5487
5.

Conference Proceedings
Conference Proceedings
5. A Low-Coherence Interferometer System for Simultaneous Measurement of Refractive Index and Thickness Ranging from 20μm to a Few Millimeters
Inoue, S. ; Maruyama, H. ; Mitsuyama, T. ; Ohmi, M. ; Ihara, K. ; Haruna, M.
Pub. info.: OFS-13 : 13th International Conference on Optical Fiber Sensors & Workshop on Device and System Technology toward Future Optical Fiber Communication and Sensing : April 12-16, 1999, Kyongju Hyundai Hotel, Kyongju, Korea.  pp.124-127,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3746
6.

Conference Proceedings
Conference Proceedings
6. Chemical Reaction of Metal-Carbon Binary Cluster Anions by FT-ICR Mass Spectrometer.
Maruyama, S. ; Kohno, M. ; Inoue, S.
Pub. info.: Fullerenes 2000 : chemistry and physics of fullerenes and carbon nanomaterials, proceedings of the International Symposium.  pp.309-319,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-12
7.

Conference Proceedings
Conference Proceedings
7. Lithography simulation system for total CD control from design to manufacturing
Kotani, T. ; Ichikawa, H. ; Kobayashi, S. ; Nojima, S. ; Izuha, K. ; Tanaka, S. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.219-229,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
8.

Conference Proceedings
Conference Proceedings
8. Influence of Channel Position on Characteristics of p-Channel c-Si TFT Inside a Location-Controlled Grain
Rana, V. ; Ishihara, R. ; Andel, I. ; Hiroshima, Y. ; Abe, D. ; Inoue, S. ; Shimoda, T. ; Metselaar, J.W. ; Beenakker, K.
Pub. info.: Thin Film Transistor Technologies (TFTT VII) : proceedings of the international symposium.  pp.92-98,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-15
9.

Conference Proceedings
Conference Proceedings
9. Application of Reactive Processing to Stampable Sheet of Toughness Improved Unsaturated Polyester
Sakai, T. ; Inoue, S. ; Sumihiro, Y.
Pub. info.: In search of excellence : conference proceedings : ANTEC '91, Montreal.  pp.651-659,  1991.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 37
10.

Conference Proceedings
Conference Proceedings
10. SELECTIVE IMAGING OF METAL ATOMS IN THE SEMICONDUCTING LAYERED COMPOUND MoS2 BY STM/STS
Inoue, S. ; Kawami, H. ; Yoshimura, M. ; Yao, T.
Pub. info.: Determining nanoscale physical properties of materials by microscopy and spectroscopy.  pp.293-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 332