1.

Conference Proceedings

Conference Proceedings
Ingle, N. K. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Wexler, R. M. ; Smith, F. T. J.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.177-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
2.

Conference Proceedings

Conference Proceedings
Gorsuch, G. ; Jin, Y. ; Ingle, N. K. ; Mountziaris, T. J. ; Yu, W.-Y. ; Petrou, A.
Pub. info.: Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A..  pp.151-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 363