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Tanimoto, S. ; Inada, M. ; Kiritani, N. ; Hoshi, M. ; Okushi, H. ; Arai, K.
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Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1221-1224, 2004. Uetikon-Zuerich. Trans Tech Publications