1.

Conference Proceedings
Conference Proceedings
1. Mask pattern quality assurance based on lithography simulation with fine pixel SEM image [5992-59]
Kariya, M. ; Yamanaka, E. ; tanaka, S. ; Ikeda, T. ; Yamaguchi, S. ; Hashimoto, K. ; Itoh, M. ; Kobayashi, H. ; Kawashima, T. ; Narukawa, S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921M-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings
Conference Proceedings
2. Simultaneous measurement of a profile shape and deformation of an object by processing projected pattern and texture pattern [5880-03]
Yoshizawa, T. ; Yamamoto, M. ; Ikeda, T.
Pub. info.: Optical Diagnostics.  pp.588003-588003,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5880
3.

Conference Proceedings
Conference Proceedings
3. A simple formulation for rewritable Bragg holograms with angle and polarization multiplicity (Invited Paper) [6332-28]
Ikeda, T. ; Shishido, A.
Pub. info.: Liquid Crystals X.  pp.63320S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6332
4.

Conference Proceedings
Conference Proceedings
4. Fabrication and Tensile Properties of Lotus-Type Porous Iron and SUS304L Stainless Steel
Hyun, S.K. ; Ikeda, T. ; Tane, M. ; Nakajima, H.
Pub. info.: Advanced structural and functional materials design : proceedings of the International Symposium on Advanced Structural and Functional Materials Design, Osaka, Japan, November 10th-12th, 2004.  pp.337-342,  2006.  Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 512
5.

Conference Proceedings
Conference Proceedings
5. Time constant of switching-off current in partially depleted SOI MOSFETs with body contacts
Ikeda, T. ; Higuchi, H. ; Ohkura, Y. ; Wakahara, S.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.251-258,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
6.

Conference Proceedings
Conference Proceedings
6. Whole-Cell Enzyme Electrodes
Ikeda, T. ; Takayama, K. ; Kurosaki, T.
Pub. info.: Proceedings of the fifth International Symposium on Redox Mechanisms and Interfacial Properties of Molecules of Biological Importance 1993.  pp.384-395,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-11
7.

Conference Proceedings
Conference Proceedings
7. Fine pixel CD-SEM for measurements of two-dimensional patterns
Yamaguchi, S. ; Itoh, M. ; Ikeda, T. ; Miyano, Y. ; Mitsui, T. ; Amma, M. ; Horikawa, S.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.607-618,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
8.

Conference Proceedings
Conference Proceedings
8. A photomask defect evaluation system
Yamanaka, E. ; Kanamitsu, S. ; Hirano, T. ; Tanaka, S. ; Ikeda, T. ; Ikenaga, O. ; Kawashima, T. ; Narukawa, S. ; Kobayashi, H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.257-264,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
9.

Conference Proceedings
Conference Proceedings
9. Liquid-crystalline elastomers with photomechanical properties (Invited Paper)
Yu, Y. ; Nakano, M. ; Ikeda, T.
Pub. info.: Liquid Crystals VIII.  pp.1-10,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5518
10.

Conference Proceedings
Conference Proceedings
10. Inline CO metrology with combined use of scatterometry and CO-SEM [6152-69]
Asano, M. ; Ikeda, T. ; Koike, T. ; Abe, H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521V-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152