1.

Conference Proceedings
Conference Proceedings
1. CATALYZED GASEOUS ETCHING OF SILICON
Selamoglu, N. ; Mucha, J.A. ; Flamm, D.L. ; Ibbotson, D.E.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.459-466,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
2.

Conference Proceedings
Conference Proceedings
2. KINETICS ARD MECHANISM OF THE COPPER-CATALYZED ETCHING OF SILICON BY F2
Selamoglu, N. ; Mucha, J.A. ; Flamm, D.L. ; Ibbotson, D.E.
Pub. info.: Microstructure and properties of catalysts : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.397-404,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 111
3.

Conference Proceedings
Conference Proceedings
3. CHEMICAL VAPOR DEPOSITION OF SiC FROM SILACYCLOBUTANE AND METHYLSILANE
Johnson, A.D. ; Perrin, J. ; Mucha, J.A. ; Ibbotson, D.E.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.451-456,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
4.

Conference Proceedings
Conference Proceedings
4. DIRECTIONAL DEPOSITION OF SILICON OXIDE BY A PLASMA ENHANCED TEOS PROCESS
Hsieh, J.J. ; Ibbotson, D.E. ; Mucha, J.A. ; Flamm, D.L.
Pub. info.: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.107-112,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 165
5.

Conference Proceedings
Conference Proceedings
5. New Applications of Ellipsometry for Materials Characterization and VLSI Device Process Control
Blayo, N. ; Grevoz, A. ; Lee, J.T.C. ; Ibbotson, D.E.
Pub. info.: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.207-216,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-33