1.

Conference Proceedings

Conference Proceedings
I. Nishimura ; W. H. Heath ; K. Matsumoto ; W.-L. Jen ; S. S. Lee
Pub. info.: Advances in resist materials and processing technology XXV.  1  pp.69231C-1-69231C-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923
2.

Conference Proceedings

Conference Proceedings
K. Matsumoto ; E. Costner ; I. Nishimura ; M. Ueda ; C. G. Willson
Pub. info.: Advances in resist materials and processing technology XXV.  1  pp.692305-1-692305-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923