1.

Conference Proceedings

Conference Proceedings
L. Y. Lee ; T. Thanigaivelan ; J. So ; B. Frasier ; I. Kashkoush
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.194-198,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
2.

Conference Proceedings

Conference Proceedings
L. Liu ; I. Kashkoush ; G. Chen ; C. Murphy
Pub. info.: Cleaning and surface conditioning technology in semiconductor device manufacturing 10.  pp.63-70,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(2)