PZT Thin Films Deposited by RF Magnetron Sputtering

PZT Thin Films Deposited by RF Magnetron Sputtering

Author(s):

Publication title:

Advanced engineering and materials : selected, peer reviewed papers from the 2013 International Conference on Mechanical Engineering and Materials (ICMEM 2013), Sanya, China, 27-28 January 2013

Title of ser.:

Applied mechanics and materials

Ser. no.:

302

Pub. Year:

2013

Page(from):

8

Page(to):

13

Pages:

6

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

16609336

ISBN:

9781627480598 [1627480595]

Language:

English

Call no.:

A69500/302

Type:

Conference Proceedings

Details

TDL ID:	ZA00053048
Series ID:	PA00000242
Conf. info. (Name):	International Conference on Mechanical Engineering and Materials (ICMEM)
Conf. info. (Number):	2013
Conf. info. (Venue):	Sanya, China
Conf. info. (Date):	2013.01.27-2013.01.28
Note for article:	2013 International Conference on Mechanical Engineering and Materials, Sanya, China, 27-28 January 2013

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