Chung, I.J. ; Oh, C.H. ; Kim, W.Y. ; Hwang, J.Y. ; Kim, Y.S. ; Park, J.S. ; Lee, S.K. ; Han, M.K.
Pub. info.:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.401-406, 1993. Pittsburgh, Pa.. Materials Research Society
Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A.. pp.183-190, 1992. Philadelphia, Pa.. Materials Research Society