Saito, T. ; Furuta, T. ; Hwang, J.-H. ; Kuramoto, S. ; Nishino, K. ; Suzuki, N. ; Chen, R. ; Yamada, A. ; Ito, K. ; Seno, Y. ; Nonaka, T. ; Ikehata, H. ; Nagasako, N. ; Iwamoto, C. ; Ikuhara, Y. ; Sakuma, T.
Pub. info.:
THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain. pp.681-688, 2003. Zuerich-Uetikon, Switzerland. Trans Tech Publications
Photomask and Next-Generation Lithography Mask Technology XI. pp.19-27, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering