1.

Conference Proceedings

Conference Proceedings
Huang,W.-S. ; Kwong,R.W. ; Moreau,W.M. ; Lang,R. ; Robinson,C.F. ; Medeiros,D.R. ; Petrillo,K.E. ; Aviram,A. ; Mahorowala,A.P. ; Angelopoulos,M. ; Magg,C. ; Lawliss,M. ; Faure,T.B.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.268-277,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings

Conference Proceedings
Kumar,U. ; Pandya,A. ; Sinta,R.F. ; Huang,W.-S. ; Bantu,R. ; Katnani,A.D.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.135-145,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
3.

Conference Proceedings

Conference Proceedings
Huang,W.-S. ; Sooriyakumaran,R. ; Kwong,R.W. ; Katnani,A.D.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.776-785,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333
4.

Conference Proceedings

Conference Proceedings
Huang,W.-S. ; Lee,K.Y. ; Chen,R.K.-J. ; Schepis,D.
Pub. info.: Advances in resist technology and processing XIII : 11-13 March 1996, San Clara, California.  pp.315-322,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2724
5.

Conference Proceedings

Conference Proceedings
Kwong,R.W. ; Huang,W.-S. ; Hartley,J.G. ; Moreau,W.M. ; Robinson,C. ; Angelopoulos,M. ; Magg,C. ; Lawliss,M.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.352-360,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
6.

Conference Proceedings

Conference Proceedings
Cheng,M.-C. ; Ho,W.-G. ; Chang,C.-P. ; Huang,W.-S. ; Huang,R.-S.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.152-157,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
7.

Conference Proceedings

Conference Proceedings
Petrillo,K. ; Brancaccio,J. ; Huang,W.-S. ; Kwong,R.W. ; Katnani,A.D.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.319-328,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
8.

Conference Proceedings

Conference Proceedings
Ashe,B. ; Deverich,C. ; Rabidoux,P.A. ; Peck,B. ; Petrillo,K.E. ; Angelopoulos,M. ; Huang,W.-S. ; Moreau,W.M. ; Medeiros,D.R.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.664-672,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
9.

Conference Proceedings

Conference Proceedings
Huang,W.-S. ; Kwong,R.W. ; Hartley,J.G. ; Moreau,W.M. ; Angelopoulos,M. ; Magg,C. ; Lawliss,M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.150-159,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
10.

Conference Proceedings

Conference Proceedings
Medeiros,D.R. ; Moreau,W.M. ; Petrillo,K.E. ; Chauhan,M. ; Huang,W.-S. ; Magg,C. ; Goldfarb,D. ; Angelopoulos,M. ; Nealey,P.F.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.241-250,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345