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23 results

Conference Proceedings

1. THE DEPENDENCE OF DEFECT DENSITY IN GeXSi1-X/Si HETEROSTRUCTURES GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION ON DEPOSITION PARAMETERS

Kinosky, D. ; Qian, R. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Magee, C. ; Grove, C. L.

Pub. info.:	Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.. pp.445-450, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	263

Conference Proceedings

2. GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF Ge Si1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, R. ; Chung, I. ; Kinosky, D. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Rabenberg, L. ; Grove, C. ; Magee, C.

Pub. info.:	Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.353-360, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	236

Conference Proceedings

3. HYDROGEN PASSIVATION OF Si (100) BY REMOTE HYDROGEN PLASMA TREATMENT

Hsu, T. ; Anthony, B. ; Breaux, L. ; Qian, R. ; Baner-jee, S. ; Tasch, A. ; Lin,. S. ; Marcus, H. L.

Pub. info.:	Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A.. pp.279-284, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	190

Conference Proceedings

4. Structure-Property-Processing Relationships of Polyurethane-Polyester Interpenetrating Polymer Networks

Wang, K. ; Hsu, T. ; Lee, L.

Pub. info.:	ANTEC 88, Atlanta, April 18-21, 1988, Conference proceedings : plastics are shaping tomorrow today : Society of Plastics Engineers 46th annual technical conference & exhibits. pp.507-512, 1988. Brookfield, CT. Society of Plastics Engineers, Inc. (SPE)
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	34

Conference Proceedings

5. HETEROEPITAXY OF Si/Si1-xGex GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Hsu, T. ; Qian, R. ; Kinosky, D. ; Irby, J. ; Anthony, B. ; Banerjee, S. ; Tasch, A. ; Magee, C.

Pub. info.:	Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.. pp.223-228, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	223

Conference Proceedings

6. RHEED OBSERVATIONS OF SILICON (100) SURFACE RECONSTRUCTION AFTER REMOTE HYDROGEN PLASMA CLEANING

Hsu, T. ; Breaux, L. ; Anthony, B. ; Banerjee, S. ; Tasch, A.

Pub. info.:	Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.161-166, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	146

Conference Proceedings

7. *REACTION KINETICS OF EPITAXIAL SILICON DEPOSITION AT 200-400o USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Anthony, B. ; Hsu, T. ; Breaux, L. ; Banerjee, S. ; Tasch, A.

Pub. info.:	Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.. pp.145-150, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	165

Conference Proceedings

8. REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF EPITAXIAL SILICON ON SILICON (100) AT 150oC

Hsu, T. ; Anthony, B. ; Breaux, L. ; Banerjee, S. ; Tasch, A.

Pub. info.:	Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.. pp.139-144, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	165

Conference Proceedings

9. Liquid Crystal Polymer/Polyethylene(LCP/PE) In-situ Composite Thin Film: Effect of Counter-Rotating Die on Film Structure and Properties

Chinsirikul, W. ; Harrison, I. ; Hsu, T.

Pub. info.:	AIChE ANNUAL MEETING - NOVEMBER 10-15, 1996 - CHICAGO, IL. 1996. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE meeting [papers]
Ser. no.:	1996

10.

Conference Proceedings

10. *IN SITU LOW TEMPERATURE CLEANING AND PASSIVATION OF SILICON BY REMOTE HYDROGEN PLASMA FOR SILICON-BASED EPITAXY

Banerjee, S. ; Tasch, A. ; Hsu, T. ; Qian, R. ; Kinosky, D. ; Irby, J. ; Mahajan, A. ; Thomas, S.

Pub. info.:	Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.43-54, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	259

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