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Conference Proceedings

1. Improving the performance of E-beam 2nd writing in mask alignment accuracy and pattern faultless for CPL technology

Lee, B. ; Hung, R. ; Lin, O. ; Wu, Y.-H. ; Kozuma, M. ; Shih, C.-L. ; Hsu, M. ; Hsu, S. D.

Pub. info.:	Advanced microlithography technologies : 8-10 November, 2004, Beijing, China. pp.114-121, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5645

Conference Proceedings

2. Nonlinear internal wave amplitude remote sensing from SAR imagery (Invited paper)

Yang, J. ; Huang, W. ; Zhou, C. ; Zhou, C. ; Hsu, M. ; Xiao, Q.

Pub. info.:	Ocean remote sensing and applications : 24-26 October 2002, Hangzhou, China. pp.450-454, 2003. Bellingham, Wash. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4892

Technical Paper

3. Silicone impregnated reusable ceramic ablators for Mars Follow-on Missions

Tran, H. ; Johnson, C. ; Rasky, D. ; Hui, F. ; Hsu, M.

Pub. info.:	AIAA paper. pp.1-13, 1996. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA Thermophysics Conference
Ser. no.:	1996

Technical Paper

4. Phenolic impregnated carbon ablators (PICA) for discovery class missions

Tran, H. ; Johnson, C. ; Rasky, D. ; Hui, F. ; Chen, Y.K. ; Hsu, M.

Pub. info.:	AIAA paper. pp.1-13, 1996. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA Thermophysics Conference
Ser. no.:	1996

Technical Paper

5. Mixing Effects of Pylon-Aided Fuel Injection Located Upstream of a Flameholding Cavity in Supersonic Flow

Montes, D. ; King, P. ; Gruber, M. ; Carter, C. ; Hsu, M.

Pub. info.:	AIAA meeting papers on disc. 2005. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	41st

Technical Paper

6. Accelerated Life Cycle Development for Electronic Throttle Control Software Using Model-Based/Auto-Code Technology.

Hsu, M. ; El-Jaroudi, M. ; Bender, E.

Pub. info.:	2004 SAE world congress : technical paper. 2004. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2004

Conference Proceedings

7. Manufacturing implementation of IML technology for 45nm node contact masks [6283-65]

Van Den Broeke, D. ; Hsu, M. ; Chen, F. J. ; Hsu, S. ; Hollerbach, U. ; Laidig, Y.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XIII. pp.62831C-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6283

Conference Proceedings

8. RET masks for petterning 45nm node contact hole using ArF immersion lithography [6283-114]

Hsu, M. ; Chen, F. J. ; Van Den Broeke, D. ; En Tszng, S. ; Shieh, J. ; Hsu, S. ; Shi, X.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XIII. pp.628317-628317, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6283

Conference Proceedings

9. Application of CPL mask for whole chip 5nm DRAM patterning [5853-69]

Lin, 0. ; Hung, R. ; Lee, B. ; Wu, Y.-H. ; Kozuma, M. ; Shih, C.-L. ; Lin, J. ; Hsu, M. ; Hsu, S. D.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.835-843, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

10.

Conference Proceedings

10. Model-based scattering bars implementation for 65nm and 45nm nodes using IML technology [5853-50]

Hsu, M. ; Van Den Broeke, D. ; Laidig, T. ; Wampler, K. E. ; Hollerbach, U. ; Socha, R. ; Chen, J. F. ; Hsu, S. ; Shi, X.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.659-671, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

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Author: Hsu, M.