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Fabrication and characterization of gated Si field emitter arrays with gate aperture below 0.5 ｦﾌm

Author(s):
Ku,T.-K. ( National Chiao Tung Univ. )
Hsieh,B.B.
Chen,M.S.
Wang,C.-C.
Wang,P.W.
Hsieh,I.-J.
Cheng,H.-C.
2 more
Publication title:
Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2641
Pub. Year:
1995
Page(from):
140
Page(to):
144
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420077 [0819420077]
Language:
English
Call no.:
P63600/2641
Type:
Conference Proceedings

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