1.

Conference Proceedings

Conference Proceedings
Hsieh, H.-C. ; Hung, J.C. ; Chin, A.S.J. ; Lee, S.C. ; Shin, J.J. ; Liu, R.G. ; Lin, B.J.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.4-15,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
2.

Conference Proceedings

Conference Proceedings
Hsu, L.T.H. ; Hung, J.C. ; Hsieh, H.-C. ; Rosenbusch, A. ; Falah, R. ; Blumberg, Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.357-363,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
3.

Conference Proceedings

Conference Proceedings
Chen, C.-J. ; Lee, H.-C. ; Yeh, L.-C. ; Liu, K.-C. ; Lien, T.-C. ; Chuo, Y.-C. ; Hsieh, H.-C. ; Lin, B.J.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.28-37,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
4.

Conference Proceedings

Conference Proceedings
Berger, L. ; Saule, W. ; Dress, P. ; Gairing, T.M. ; Chen, C.-J. ; Lee, H.-C. ; Hsieh, H.-C.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.148-154,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
5.

Conference Proceedings

Conference Proceedings
Berger, L. ; Dress, P. ; Gairing, T. ; Chen, J.J. ; Hsieh, R.-G. ; Lee, H.-C. ; Hsieh, H.-C.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.380-391,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
6.

Conference Proceedings

Conference Proceedings
Wang, W.-C. ; Chang, S.-M. ; Chin, C.C. ; Lu, C.-L. ; Chin, A.S.J. ; Hsieh, H.-C. ; Yu, S.-S.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.266-275,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
7.

Conference Proceedings

Conference Proceedings
Chen, C.-J. ; Lee, H.-C. ; Lu, C.-L. ; Hsieh, R.-G. ; Chen, W.-C. ; Hsieh, H.-C. ; Lin, B.-J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.673-683,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
8.

Conference Proceedings

Conference Proceedings
Chang, S.-M. ; Chin, C.C. ; Wang, W.-C. ; Lu, C.-L. ; Hsieh, R.-G. ; Tsay, C.-S. ; Yen, Y.-S. ; Chin, S.-C. ; Lee, H.-C. ; Liu, R.-G. ; Chen, K.-S. ; Hsieh, H.-C. ; Ku, Y.C. ; Lin, J.C.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1065-1071,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256