1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION OF PRECLEAN INDUCED SURFACE DAMAGE BY RAPID THERMAL PROCESSING
Hseih, T. Y. ; Jung, K. H. ; Koschmieder, T. H. ; Thompson, J. C.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.279-284,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
2.

Conference Proceedings
Conference Proceedings
2. *APPLICATION OF RTP-CVD TECHNOLOGY TO ULSI DEVICE FABRICATION
Jung, K. H. ; Hseih, T. Y. ; Kwong, D. L.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.261-272,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
3.

Conference Proceedings
Conference Proceedings
3. Si AND GeSi1-x EPITAXIAL GROWTH ON SOI STRUCTURES BY RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION
Hseih, T. Y. ; Jung, K. H. ; Kwong, D. L. ; Lin, S. ; Marcus, H. L.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.285-292,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224