Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.179-184, 1989. Pittsburgh, Pa.. Materials Research Society
Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A.. pp.323-328, 1986. Pittsburgh, Pa.. Materials Research Society
Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A.. pp.15-22, 1985. Pittsburgh, Pa.. Materials Research Society
Hoyt, J.L. ; Mitchell, T.O. ; Rim, K. ; Singh, D. ; Gibbons, J.F.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1254-1265, 1997. Pennington, NJ. Electrochemical Society
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.27-32, 2001. Pennington, N.J.. Electrochemical Society
Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.. pp.33-38, 2002. Warrendale, Pa.. Materials Research Society