Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A.. pp.279-286, 1990. Pittsburgh, Pa.. Materials Research Society
Howard, D. J. ; Wolf, I. De ; Bender, H. ; Maex, K.
Pub. info.:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.251-, 1996. Pittsburgh. MRS - Materials Research Society
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.85-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Tung, R. T. ; Howard, D. J. ; Ohmi, S. ; Caymax, M. ; Maex, K.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.427-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Wolf, I. De ; Howard, D. J. ; Maex, K. ; Maes, H. E.
Pub. info.:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.47-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society