1.

Conference Proceedings
Conference Proceedings
1. SOLID PHASE EPITAXY OF STRAINED Si1-x Gex ALLOYS FORMED BY HIGH-DOSE ION IMPLANTATION INTO <00> SILICON
Howard, D. J. ; Paine, D. C. ; Stoffel, N. G.
Pub. info.: Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A..  pp.279-286,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 187
2.

Conference Proceedings
Conference Proceedings
2. Stress in Silicon Due to the Formation of Self Aligned Poly-CoSi2 Lines Studied by Micro-Raman Spectroscopy
Howard, D. J. ; Wolf, I. De ; Bender, H. ; Maex, K.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.251-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
3.

Conference Proceedings
Conference Proceedings
3. Effects on Selective CVD of Titanium Disilicide by Substrate Doping and Selective Silicon Deposition
Maa, J-S. ; Howard, D. J.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.85-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
4.

Conference Proceedings
Conference Proceedings
4. Oxide Mediated Epitaxy on Planar and Non-Planar Si
Tung, R. T. ; Howard, D. J. ; Ohmi, S. ; Caymax, M. ; Maex, K.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.427-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
5.

Conference Proceedings
Conference Proceedings
5. Phase and Mechanical Stress in and Surrounding TiSi2 and CoSi2 Lines Studied by Micro-Raman Spectroscopy
Wolf, I. De ; Howard, D. J. ; Maex, K. ; Maes, H. E.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.47-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427