1.

Conference Proceedings
Conference Proceedings
1. Growth Parameters Determining the Type of Grown-in Defects in Czochralski Silicon Crystals
Hourai,M. ; Kajita,E. ; Nagashima,T. ; Fujiwara,H. ; Sadamitsu,S. ; Miki,S. ; Shigematsu,T.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1713-1718,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
2.

Conference Proceedings
Conference Proceedings
2. Determination of COP distribution after SC1 cleaning by a laser particle counter
Fujise,T. ; Yanase,Y. ; Hourai,M. ; Sano,M. ; Tsuya,H.
Pub. info.: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III.  pp.16-25,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2877