1.

Conference Proceedings
Conference Proceedings
1. Lithography-independent fabrication of nano-MOS-transistors with W = 25 nm and L = 25 nm
Horst, C. ; Kallis, K.T. ; Horstmann, J.T. ; Goser, K. F.
Pub. info.: Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China.  pp.223-227,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5253
2.

Conference Proceedings
Conference Proceedings
2. μ-Raman Spectra Analysis of the Evolution of Hydrogen Related Defects and Void Formation in the Silicon Ion-Cut Process
Dungen, W. ; Job, R. ; Ma, Y. ; Huang, Y.L. ; Fahrner, W.R. ; Keller, L.O. ; Horstmann, J.T.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.503-508,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864
3.

Conference Proceedings
Conference Proceedings
3. Void Formation in Hydrogen Implanted and Subsequently Plasma Hydrogenated and Annealed Czochralski Silicon
Job, R. ; Dungen, W. ; Ma, Y. ; Huang, Y.L. ; Horstmann, J.T.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.487-492,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864