1.

Conference Proceedings
Conference Proceedings
1. Yield management by threshold voltage adjustment in back-end process (Invited Paper)
Ito,S. ; Noguchi,K. ; Horiuchi,T.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.184-191,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings
Conference Proceedings
2. Reliability scaling in deep submicron MOSFETs
Horiuchi,T. ; Ito,H. ; Kimizuka,N.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.108-117,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875