1.

Conference Proceedings

Conference Proceedings
Kim, In-Kwon ; Kang, Young-Jae ; Hong, Yi-Koan ; Park, Jin-Goo
Pub. info.: Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A..  pp.3-8,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 867
2.

Conference Proceedings

Conference Proceedings
Hong, Yi-Koan ; Han, Ja-Hyung ; Song, Jae-Hoon ; Park, Jin-Goo
Pub. info.: Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A..  pp.123-128,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 867
3.

Conference Proceedings

Conference Proceedings
Kang, Young-Jae ; Hong, Yi-Koan ; Song, Jae-Hoon ; Kim, In-Kwon ; Park, Jin-Goo
Pub. info.: Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A..  pp.153-158,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 867
4.

Conference Proceedings

Conference Proceedings
Song, Jae-Hoon ; Han, Ja-Hyung ; Hong, Yi-Koan ; Kang, Young-Jae ; Park, Jin-Goo ; Maeng, Ju-Ho ; Won, Young-Man
Pub. info.: Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A..  pp.35-40,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 867