1.

Conference Proceedings
Conference Proceedings
1. New OPC methods to increase process margin for sub-70nm devices
Hong, J. -S. ; Kim, D. -H. ; Kim, S. -W. ; Yoo, M. -H. ; Kong, J. -T.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.302-312,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. Efficient OPC model generation and verification for focus variation [6154-128]
Park, Y. H. ; Ban, Y. C. ; Hur, D. H. ; Kim, D. -H. ; Hong, J. -S. ; Yoo, M. -H. ; Kong, J. T.
Pub. info.: Optical Microlithography XIX.  pp.61543B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154