Padmanaban, M. ; Renfkiewicz, D. ; Lee, S. ; Hong, C. ; Lee, D. ; Rahman, D. ; Sakamuri, R. ; Dammel, R. R.
Pub. info.:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.252-260, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.1551-1554, 2005. Uetikon-Zuerich. Trans Tech Publications
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. pp.614927-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering