Pack, R.C. ; Heins, M.D. ; Chatila, A.R. ; Boksha, V.V. ; Cottrell, D. ; Berglund, C.N. ; Hogan, J. ; James, F. ; Vucurevich, T. ; Bales, M. ; Shimasaki, K.
Pub. info.:
Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.566-584, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hogan, J. ; Chatila, A.R. ; Bruggeman, B. ; Boksha, V.V.
Pub. info.:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.1-26, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hogan, J. ; Progler, C. ; Chatila, A. ; Bruggeman, B. ; Heins, M. ; Pack, R. ; Boksha, V.
Pub. info.:
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.21-38, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
A collection of technical papers : AIAA's 1st Technical Conference & Workshop on Unmanned Aerospace Vehicles, Systems, Technologies, and Operations, Portsmouth, Virginia, 20-23 May 2002. pp.346-354, 2002. Reston, VA. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : Technical Conference and Workshop on Unmanned Aerospace Vehicles, Systems, Technologies, and Operations
Conference Proceedings
Technical Paper
