1.

Conference Proceedings
Conference Proceedings
1. THE EFFECT OF RAPID THERMAL PROCESSING ON THE ELECTRICAL CHARACTERISTICS OF POLYSILICON GATE MOS CAPACITORS
Felch, Susan B. ; Hodul, David T. ; Salimian, Mak
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.235-240,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
2.

Conference Proceedings
Conference Proceedings
2. SYNCHROTRON TOPOGRAPHIC STUDIES OF THE INFLUENCE OF RAPID THERMAL PROCESSING ON DEFECT STRUCTURES IN SINGLE CRYSTAL SILICON
Dudley, Michael ; Wang, Franklin F.Y. ; Fanning, Thomas ; Tolis, Georgios ; Wu, Jun ; Hodul, David T.
Pub. info.: Defects in materials : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.511-516,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 209