1.

Conference Proceedings
Conference Proceedings
1. LASER STUDIES OF THE INTERACTION OF SiO WITH THE SURFACE OF A THIN FILM
Ho, Pauline ; Buss, Richard J. ; Weber, M.E.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.483-488,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
2.

Conference Proceedings
Conference Proceedings
2. *LASER PROBES AND NUMERICAL MODELING AS PROCESS DIAGNOSTICS IN CHEMICAL VAPOR DEPOSITION
Breiland, William G. ; Ho, Pauline ; Coltrin, Michael E, ; Kee, Robert J. ; Evans, Greg H.
Pub. info.: Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A..  pp.23-34,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 117
3.

Conference Proceedings
Conference Proceedings
3. LASER STUDIES OF THE SiH RADICAL/SURFACE INTERACTION DURING DEPOSITION OF A THIN A THIN FILMS
Ho, Pauline ; Buss, Richard J. ; Breilsnd, William G.
Pub. info.: Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.233-238,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 131
4.

Conference Proceedings
Conference Proceedings
4. THERMOCHEMICAL DATA FOR CVD MODELING FROM AB INITIO CALCULATIONS
Ho, Pauline ; Melius, Carl F.
Pub. info.: Metal-organic chemical vapor deposition of electronic ceramics : Symposium held on November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.131-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 335
5.

Conference Proceedings
Conference Proceedings
5. THEORETICAL MODELING AND LASER DIAGNOSTICS OF SILICON CHEMICAL VAPOR DEPOSITION
Coltrin, Michael. E. ; Breiland, William. G. ; Ho, Pauline
Pub. info.: AIChE ANNUAL MEETING - CHICAGO, IL., NOVEMBER 10-15, 1985.  1985.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1985
6.

Conference Proceedings
Conference Proceedings
6. GAS-PHASE SILICON ATOM DENSITIES IN THE CHEMICAL VAPOR DEPOSITION OF SILICON FROM SILANE
Coltrin, Michael E. ; Breiland, William G. ; Ho, Pauline
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.3-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334