Blank Cover Image

In situ infrared absorption spectroscopy for thin film growth by atomic layer deposition (Invited Paper) [6325-16]

Author(s):
Publication title:
Physical Chemistry of Interfaces and Nanomaterials V
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6325
Pub. Year:
2006
Page(from):
63250G
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464040 [081946404X]
Language:
English
Call no.:
P63600/6325
Type:
Conference Proceedings

Similar Items:

M. Dai, J. Kwon, E. Langereis, L.S. Wielunski, Y. Chabal

Electrochemical Society

Liu, J.J., Shi, J.W., Zhang, S.M., Wang, W., Guo, S.X., Liu, M.D.

SPIE-The International Society for Optical Engineering

Frank, Martin M., Chabal, Yves J., Wilk, Glen D.

Materials Research Society

Wang,W., Hammond,R.H., Fejer,M.M., Beasley,M.R.

SPIE-The International Society for Optical Engineering

Blin, D., Rochat, N., Rolland, G., Holliger, P., Martin, F., Damlencourt, J.-F., Lardin, T., Besson, P., Haukka, S., …

SPIE-The International Society for Optical Engineering

Jinhee Kwon, Min Dai, Yves J. Chabal, Mathew D. Halls, Roy Gordon

Materials Research Society

Bun, D., Rochat, N., Rolland, G., Holliger, P., Martin, F., Damlencourt, J.-F., Lardin, T., Besson, P., Haukka, S., …

Electrochemical Society

Bloomfield, M.O., Im, Y.H., Wang, J., Huang, H., Cale, T.S.

SPIE-The International Society for Optical Engineering

Leskela, M., Aaltonen, T., Hamalainen, J., Niskanen, A., Ritala, M.

Electrochemical Society

Hwang, H., Park, K., Yoon, S., Yoon, E., Cheong, H.M., Kim, Y.D.

SPIE-The International Society for Optical Engineering

Kukli, K., Peussa, M., Johansson, L. -S., Nykanen, E., Niinisto, L.

Trans Tech Publications

George, S. M., Ferguson, J. D., Klaus, J. W.

MRS-Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12