1.

Conference Proceedings

Conference Proceedings
Kubo, S. ; Hiruta, K. ; Sugiyama, M. ; Iwamatsu, T. ; Fujisawa, T. ; Morimoto, H.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.426-435,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748
2.

Conference Proceedings

Conference Proceedings
Fujisawa, T. ; Iwamatsu, T. ; Hiruta, K. ; Morimoto, H. ; Sasaki, T. ; Yamashiro, K.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.147-152,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748