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34 results

Conference Proceedings

1. METASTABILITY OF LUMINESCENT POROUS SILICON

Miyazaki, S. ; Sakamoto, K. ; Shiba, K. ; Hirose, M.

Pub. info.:	Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.299-304, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	283

Conference Proceedings

2. INTENSE VISIBLE LUMINESCENCE FROM THERMALLY-OXIDIZED POROUS SILICON

Miyazaki, S. ; Shiba, K. ; Sakamoto, K. ; Hirose, M.

Pub. info.:	Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.269-274, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	283

Conference Proceedings

3. CHEMICAL STRUCTURE OF NATIVE OXIDE GROWN ON HYDROGEN-TERMINATED SILICON SURFACES

Takakura, M. ; Yasaka, T. ; Miyazaki, S. ; Hirose, M.

Pub. info.:	Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.113-118, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	259

Conference Proceedings

4. CLEANING AND OXIDATION OF HEAVILY DOPED Si SURFACES

Yasaka, T. ; Uenaga, S. ; Yasutake, H. ; Takakura, M. ; Miyazaki, S. ; Hirose, M.

Pub. info.:	Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.385-390, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	259

Conference Proceedings

5. LAYER-BY-LAYER OXIDATION OF SILICON

Yasaka, T. ; Takakura, M. ; Miyasaki, S. ; Hirose, M.

Pub. info.:	Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.. pp.225-232, 1991. Pittsburgh. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	222

Conference Proceedings

6. INVITED: TUNNEL CURRENT AND WEAROUT PHENOMENA IN SUB-5 nm GATE OXIDES

Hirose, M. ; Mizubayashi, W. ; Fukuda, M. ; Miyazaki, S.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.730-744, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(1)

Conference Proceedings

7. High-Speed GaAs Epitaxial Lift-off and Bonding with High Alignment Accuracy using Sapphire Plate

Sasaki, Y. ; Maeda, J. ; Koishi, T. ; Hashimoto, K. ; Shibahara, K. ; Yokoyama, S. ; Miyazaki, S. ; Hirose, M.

Pub. info.:	Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.207-213, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-36

Conference Proceedings

8. INVITED: MIRAI PROJECT

Hirose, M.

Pub. info.:	Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.82-96, 2002. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-2

Conference Proceedings

9. *SURFACE PROCESSES IN LASER-INDUCED ETCHING OF SILICON STUDIES BY X-RAY PHOTOELECTRON SPECTROSCOPY

Hirose, M. ; Ogura, T.

Pub. info.:	Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.357-368, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	75

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Conference Proceedings

10. WIDE-GAP POLYSILANE PRODUCED BY PLASMA-ENHANCED CVD AT CRYOGENIC TEMPERATURES

Miyazaki, S. ; Shin, H. ; Okamoto, K. ; Hirose, M.

Pub. info.:	Wide band gap semiconductors : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.681-686, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	242

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