1.

Conference Proceedings
Conference Proceedings
1. Light Scattering Study of Roughness and Dishing on Post-CMP Wafers
Ding, P. ; Diaz, R. ; Hirleman, D.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.56-74,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-26
2.

Conference Proceedings
Conference Proceedings
2. Measurement of Silicon Particles by Laser Surface Scanning and 365 Angle-Resolved Light Scattering
Huff, H.R. ; Goodall, R.K. ; Williams, E. ; Woo, K-S. ; Liu, B.Y.H. ; Warner, T. ; Hirleman, D. ; Gildersleeve, K. ; Bullis, W.M. ; Seheer, B.W. ; Stover, J.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.365-383,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5