Huijbregste, J. ; Haren, R.J.F. ; Jeunink, A. ; Hinnen, P.C. ; Swinnen, B. ; Navarro, R. ; Simons, G. ; Bilsen, F. ; Tolsma, H. ; Megens, H.J.L.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVII. 2 pp.918-928, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering