1.

Conference Proceedings

Conference Proceedings
Su, J. ; Hills, G.W. ; Tsai, P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.291-299,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings

Conference Proceedings
Lum, R. ; Tsai, P. ; Furr, M. ; Bucknall, R.E. ; Wiltse, M. ; Hills, G.W.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.254-263,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
3.

Conference Proceedings

Conference Proceedings
Jha, N. ; Shin, H. ; Hills, G.W. ; Qian, X.Y. ; Hu, C.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.319-330,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
4.

Conference Proceedings

Conference Proceedings
Hemker, D.J. ; Qian, X.Y. ; Lum, R.T. ; Hills, G.W.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.149-159,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
5.

Conference Proceedings

Conference Proceedings
Kalinowski, I.J. ; Bourlot, C. ; Marfoure, A. ; Louveau, O. ; Li, S. ; Su, J. ; Hills, G.W. ; Louis, D.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.216-223,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10
6.

Conference Proceedings

Conference Proceedings
Li, S. ; Ostrowski, K. ; Kalinovski, I.J. ; Su, J. ; Hills, G.W.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.224-231,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10