1.

Conference Proceedings
Conference Proceedings
1. Micromachined pressure gauge for the vacuum range based on damping of a resonator
Kurth,S. ; Hiller,K. ; Zichner,N. ; Mehner,J. ; Iwert,T. ; Biehl,S. ; Dotzel,W. ; Gessner,T.
Pub. info.: MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA.  pp.103-111,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4559
2.

Conference Proceedings
Conference Proceedings
2. Optical full-field technique for measuring deflection and strain on micromechanical components
Aswendt,P. ; Hofling,R. ; Hiller,K.
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.50-60,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875
3.

Conference Proceedings
Conference Proceedings
3. Low-temperature approaches for fabrication of high-frequency microscanners
Hiller,K. ; Hahn,R. ; Kaufmann,C. ; Kurth,S. ; Kehr,K. ; Gessner,T. ; Dotzel,W. ; Wiemer,M. ; Schubert,I.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.58-66,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878