1.

Conference Proceedings
Conference Proceedings
1. Model building, control design, and practical implementation of a high precision high dynamical MEMS acceleration sensor (Invited Paper)
Wolfram, H. ; Schmiedel, R. ; Hiller, K. ; Aurich, T. ; Gunther, W. ; Kurth, S. ; Mehner, J. ; Dotzel, W. ; GeBner, T.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.326-340,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
2.

Conference Proceedings
Conference Proceedings
2. Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement
Billep, D. ; Hiller, K. ; Fromel, J. ; Tenholte, D. ; Reuter, D. ; Dofzel, W. ; GeBner, T.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.341-350,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
3.

Conference Proceedings
Conference Proceedings
3. Wafer Bonding for Patterning of Micromechanical Sensors
Wierner, M. ; Hiller, K. ; Gessner, T.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.138-146,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
4.

Conference Proceedings
Conference Proceedings
4. Application of High and Low Wafer Bonding Processes for Bulk Micromachined Components
Wiemer, M. ; Hiller, K. ; Hahn, R. ; Kaufmann, C. ; Gessner, T.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.368-380,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-35
5.

Conference Proceedings
Conference Proceedings
5. Bonding and Metallization for a High Precision Acceleration Sensor
Gessner, T. ; Wiemer, M. ; Hiller, K. ; Hafen, M.
Pub. info.: Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems.  pp.297-308,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-27
6.

Conference Proceedings
Conference Proceedings
6. Testing microcomponents by speckle interferometry
Aswendt, P. ; Hofling, R. ; Hiller, K.
Pub. info.: Microsystems Metrology and Inspection.  pp.165-173,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3825
7.

Conference Proceedings
Conference Proceedings
7. An electrically tunable infrared filter on base of Fabry-Perot interferometer
Kurth, S. ; Hiller, K. ; Neumann, N. ; Heinze, M. ; Doetzel, W. ; Gessner, T.
Pub. info.: Microwave and Optical Technology 2003.  pp.95-100,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5445
8.

Conference Proceedings
Conference Proceedings
8. Tunable Fabry-Perot interferometer for 3- to 4.5-μm wavelength with bulk micromachined reflector carrier
Kurth, S. ; Hiller, K. ; Neumann, N. ; Heinze, M. ; Doetzel, W. ; Gessner, T.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.215-226,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983
9.

Conference Proceedings
Conference Proceedings
9. Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators
Hiller, K. ; Kuchler, M. ; Billep, D. ; Schroter, B. ; Dienel, M. ; Scheibner, D. ; Gessner, T.
Pub. info.: Micromachining and Microfabrication Process Technology X.  pp.80-91,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5715