1.

Conference Proceedings
Conference Proceedings
1. Recent advances in endpoint and in-line monitoring techniques for chemical-mechanical polishing processes
Stein,D.J. ; Hetherington,D.L.
Pub. info.: In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK.  pp.157-170,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4406
2.

Conference Proceedings
Conference Proceedings
2. Prediction of tungsten CMP pad life using blanket removal rate data and endpoint data obtained from process temperature and carrier motor current measurements
Stein,D.J. ; Hetherington,D.L.
Pub. info.: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.112-119,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3743
3.

Conference Proceedings
Conference Proceedings
3. Analysis of in-situ vibration monitoring for end-point detection of CMP planarization processes
Hetherington,D.L. ; Stein,D.J. ; Lauffer,J.P. ; Wyckoff,E.E. ; Shingledecker,D.M.
Pub. info.: In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland.  pp.89-101,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3743
4.

Conference Proceedings
Conference Proceedings
4. Integrated mold/surface-micromachining process
Barron,C.C. ; Fleming,J.G. ; Montague,S. ; Sniegowski,J.J. ; Hetherington,D.L.
Pub. info.: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.30-35,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2722
5.

Conference Proceedings
Conference Proceedings
5. Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)
Smith,J.H. ; Rodgers,M.S. ; Sniegowski,S.L. ; Miller,S.L. ; Hetherington,D.L. ; McWhorter,P.J. ; Warren,M.E.
Pub. info.: Micromachined Devices and Components IV.  pp.42-47,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
6.

Conference Proceedings
Conference Proceedings
6. In-line monitoring of chemical-mechanical polishing processes
Hetherington,D.L. ; Stein,D.J.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.24-35,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884